Fabrication of mems devices – a scanning micro mirror case study

  • Artur Zarzycki Instituto Tecnológico Metropolitano
  • Wiktor L. Gambin Politechnika Warszawska
  • Sylwester Bargiel University Bourgogne Franche-Comté
  • Christophe Gorecki University Bourgogne Franche-Comté
Keywords: MEMS, microsystems, microfabrication, microtechnology, microscanner, scanning micromirror


This paper presents the working principle, design, and fabrication of a silicon-based scanning micromirror with a new type of action mechanism as an example of MEMS (Micro-Electro-Mechanical Systems). Micromirrors can be found in barcode readers as well as micro-projectors, optical coherence tomography, or spectrometers’ adjustable filters. The fabrication process of the device prompted us to describe and discuss the problems related to the manufacture of MEMS. The article starts with some terminology and a brief introduction to the field of microsystems. Afterwards, the concept of a new scanning micromirror is explained. The device is operated by two pairs of thermal bimorphs. A special design enables to maintain a constant distance from the center of the mirror to the light source during the scanning process. The device was implemented in a one degree-of-freedom micromirror and a two degree-of-freedom micromirror. The fabrication process of both types is described. For each case, a different type of substrate was used. The first type of substrate was a standard silicon wafer; the second one, SOI (Silicon-On-Insulator). The process with the first one was complicated and caused many problems. Replacing this substrate with SOI solved some of the issues, but did not prevent new ones from arising. Nevertheless, the SOI substrate produces much better results and it is preferable to manufacture this type of MEMS devices.

Author Biographies

Artur Zarzycki, Instituto Tecnológico Metropolitano

PhD en Ingeniería Mecánica, Ingeniería Electromecánica, Grupo de Investigación en Automática, Electrónica y Ciencias Computacionales, Línea Sistemas de Control y Robótica, Facultad de Ingenierías

Wiktor L. Gambin, Politechnika Warszawska

PhD en Mecánica Aplicada, Instytut Mikromechaniki i Fotoniki, Zakład Mechaniki Stosowanej

Sylwester Bargiel, University Bourgogne Franche-Comté

PhD en Ingeniería Electrónica, Département Micro Nano Sciences & Systèmes, MOEMS, Institut FEMTO-ST

Christophe Gorecki, University Bourgogne Franche-Comté

PhD en Ingeniería de Microsistemas, Département Micro Nano Sciences &Systèmes, MOEMSInstitut FEMTO-ST


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Fabrication of MEMS devices – a scanning micro mirror case study
TecnoLógicas, ISSN 0123-7799 - ISSN-e 2256-5337, Vol. 20, No. 39, mayo - agosto de 2017
micromirror platform based on MEMS technology for medical application", in Micromachines, 7, 2, 24. [3] G. Lammel, S. Schweizer and P. Renaud, "Optical Microscanners and Microspectrometers using Thermal Bimorph Actuators", Boston: Kluwer Academic Publishers, 2002. [4] W. Gambin and A. Zarzycki, "Urządzenie skanujące". PL Patent 216517 (B1), 30 April 2014. [5] W. Gambin and A. Zarzycki, "Thermal and dynamical analysis of a new microscanner behaviour," in Proc. of the 1-st Int. Conf. Multidisciplinary Design Optimisation and Application, Besancon, 2007. [6] A. Zarzycki and W. Gambin, "New thermally actuated microscanner – design, analysis
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How to Cite
Zarzycki, A., Gambin, W. L., Bargiel, S., & Gorecki, C. (2017). Fabrication of mems devices – a scanning micro mirror case study. TecnoLógicas, 20(39), 141-155. https://doi.org/10.22430/22565337.697


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